Microelectronics, Microfluidics & MEMS
materials and processes used in the fabrication of electronic/optical/microfluidic devices, integrated circuits, and microelectromechanical systems (MEMS)
Participating Faculty
-
Mark Allen
Sue Ann Bidstrup Allen
Victor Breedveld
Tom Fuller
Martha Grover Gallivan
Clifford Henderson
Dennis Hess
Paul Kohl
Jay Lee
Hang Lu
Pete Ludovice
Mark Prausnitz
Elsa Reichmanis