Georgia Institute of TechnologySchool of Chemical & Biomolecular Engineering

Microelectronics, Microfluidics & MEMS Research Projects

    Properties and performance of ultrathin polymer resists

    Photodefinable sacrificial polymers for microfabrication

  • Micropatterning by surface monolayer initiated polymerization

  • Photodefinable metal-organic materials

  • Area-selective atomic layer deposition

  • Deposition of high dielectric constant materials

  • Design, fabrication, and characterization of integrated microfluidic devices

  • Environmentally benign surface cleaning and modification using elevated pressure fluids

  • Plasma processes for film etching, deposition, and polymerization

  • Synthesis and characterization of high performance dielectric materials

  • Polymeric and inorganic pellicle characterizatioin

  • Polymeric and inorganic pellicle characterizatioin

  • Low temperature, rapid curing processes for polymer dielectrics

  • Control strategies for chemical vapor deposition

  • Real-time material property estimation using limited sensor data

  • Process models for real-time process control

  • Novel thermal management schemes for electronic devices

  • Chemical mechanical polishing

  • Molecular Modeling of Polymers for Microelectronic Applications

  • Development of photosensitive thermally sacrificial polymers and processes for microfluidic device fabrication

  • Use of novel fabrication techniques to build on-chip, multi-layered, interconnected microchannel networks and devices

  • Design, fabrication, and characterization of microfluidic fluid pumping devices

  • Design, fabrication, and characterization of microfluidic separation devices

  • Integration of microfluidic devices with CMOS integrated circuit (IC) technology

  • Development of materials and processes for the fabrication of microfluidic fuel cell systems

  • Development of materials and microfluidic devices for active cooling of microelectronic devices

  • Use of microfluidic systems for microrheological studies of complex fluids

  • Development of microfluidic devices for studying cell and organism behaviors in complex biological, chemical, and physical environments

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